Applying reticle enhancement technique recipes based on failure modes predicted by an artificial neural network
US11126782B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 10, 2020 |
| Grant date | Sep 21, 2021 |
| Priority date | — |
| Expiry date | Aug 10, 2040 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Training data may be collected for each design intent in a set of design intents by identifying a set of failures that is expected to occur when the design intent is manufactured, and recording a failure mode and a location of each failure in the set of failures. Next, the training data may be used to train a machine learning model, e.g., an artificial neural network, to predict failure modes and locations of failures. The trained machine learning model, e.g., trained artificial neural network, can then be used to predict a set of failures for a given design intent. Next, for each predicted failure, a reticle enhancement technique (RET) recipe may be selected based on the failure mode of the failure, and the selected RET recipe may be applied to an area around the location of the failure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.