Patent · US Active

Extraction apparatus and system for high throughput ion beam processing

US11127556B2 · kind B2 · utility

1Cited by

1References

17Claims

0Family size

Assignee

Varian Semiconductor Equipment Associates, Inc. · US

Inventors

Costel Biloiu · Rockport, US
Jon Ballou · Beverly, US
James P. Buonodono · Amesbury, US

Key dates

Filing date	Sep 23, 2019
Grant date	Sep 21, 2021
Priority date	—
Expiry date	Oct 16, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/3365
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

In one embodiment, an ion extraction optics for extracting a plurality of ion beams is provided. The ion extraction optics may include, an extraction plate, the extraction plate defining a cut-out region, the cut-out region being elongated along a first direction. The extraction apparatus may include a slidable insert, the slidable insert disposed to overlap the cut-out region, and slidably movable with respect to the extraction plate, along the first direction, wherein the slidable insert and cut-out region define a first aperture and a second aperture.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.