Inventor · Rockport, MA, US

Costel Biloiu

47Patents
6h-index
65Co-inventors
68Inventor score

Filing activity: Jun 5, 2007 → Sep 26, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US9706634B2 Apparatus and techniques to treat substrates using directional plasma and reactive gas Electricity 10 Active
US9396902B2 Gallium ION source and materials therefore Electricity 8 Active
US8436318B2 Apparatus for controlling the temperature of an RF ion source window Electricity 8 Active
US7888662B2 Ion source cleaning method and apparatus Electricity 7 Active
US9060411B2 Hardware plasma interlock system Electricity 6 Active
US7812321B2 Techniques for providing a multimode ion source Electricity 6 Active
US9514912B2 Control of ion angular distribution of ion beams with hidden deflection electrode Electricity 5 Active
US8142607B2 High density helicon plasma source for wide ribbon ion beam generation Electricity 5 Active
US9293301B2 In situ control of ion angular distribution in a processing apparatus Electricity 5 Active
US10004133B2 Apparatus and techniques to treat substrates using directional plasma and reactive gas Electricity 4 Active
US10192727B2 Electrodynamic mass analysis Electricity 4 Active
US7999479B2 Conjugated ICP and ECR plasma sources for wide ribbon ion beam generation and control Emerging Cross-Sectional Technologies 3 Active
US10224181B2 Radio frequency extraction system for charge neutralized ion beam Electricity 3 Active
US10468226B1 Extraction apparatus and system for high throughput ion beam processing Electricity 3 Active
US8590485B2 Small form factor plasma source for high density wide ribbon ion beam generation Electricity 3 Active
US10665433B2 Extreme edge uniformity control Electricity 3 Active
US8659229B2 Plasma attenuation for uniformity control Electricity 2 Active
US11056319B2 Apparatus and system having extraction assembly for wide angle ion beam Electricity 2 Active
US11812539B2 Resonator, linear accelerator configuration and ion implantation system having rotating exciter Electricity 2 Active
US9620335B2 In situ control of ion angular distribution in a processing apparatus Electricity 2 Active
US11596051B2 Resonator, linear accelerator configuration and ion implantation system having toroidal resonator Electricity 2 Active
US10128082B2 Apparatus and techniques to treat substrates using directional plasma and point of use chemistry Electricity 1 Active
US9187832B2 Extended lifetime ion source Electricity 1 Active
US11127556B2 Extraction apparatus and system for high throughput ion beam processing Electricity 1 Active
US9299536B2 Wide metal-free plasma flood gun Electricity 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.