Patent · US Active

Method for transferring structures

US11127710B2 · kind B2 · utility

1Cited by

1References

26Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Lamine Benaissa · Massy, FR
Ismail Degirmencioglu · Grenoble, FR

Key dates

Filing date	Jul 5, 2019
Grant date	Sep 21, 2021
Priority date	—
Expiry date	Sep 14, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH10H20/857
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A transfer method includes steps of a) supplying a support layer having a first face, structures being assembled by their front face on the first face, and c) transferring the structures onto a host face of a host substrate. The support layer includes folding regions, between the structures, adapted to pass from a folded state to an unfolded state under the action of an external excitation. Between steps a) and c), a step b) is included of executing the external action in such a way as to make the folding regions pass from the folded state to the unfolded state such that the spacing between the structures varies.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.