Patent · US Active

Micromechanical device and corresponding production method

US11130672B2 · kind B2 · utility

1Cited by

2References

8Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Johannes Baader · Glückstadt, DE
Nicolas Schorr · Reutlingen, DE
Rainer Straub · Entringen, DE
Stefan Pinter · Reutlingen, DE
Tina Steigert · Stuttgart, DE

Key dates

Filing date	Jul 30, 2018
Grant date	Sep 28, 2021
Priority date	—
Expiry date	Jul 30, 2038

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2203/019
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A micromechanical apparatus and a corresponding production method are described. The micromechanical apparatus encompasses a base substrate having a front side and a rear side; and a cap substrate, at least one surrounding trench having non-flat side walls being embodied in the front side of the base substrate; the front side of the base substrate and the trench being coated with at least one metal layer; the non-flat side walls of the trench being covered nonconformingly with the metal so that they do not form an electrical current path in a direction extending perpendicularly to the front side; and a closure, in particular a seal-glass closure, being embodied in the region of the trench between the base substrate and the cap substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.