Position correction method and a system for position correction in relation to four probe resistance measurements
US11131700B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 8, 2018 |
| Grant date | Sep 28, 2021 |
| Priority date | — |
| Expiry date | Mar 16, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R27/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to a method of establishing specific electrode positions by providing a multi-point probe and a test sample. The method comprises the measuring or determining of a distance between two of the electrodes of the multi-point probe and establishing a resistance model representative of the test sample. The method further comprises the performing of at least three different sheet resistance measurements and establishing for each of the different sheet resistance measurement a corresponding predicted sheet resistance based on the resistance model. Thereafter the method comprises the establishment of a set of differences constituting the difference between each of the predicted sheet resistance and its corresponding measured sheet resistance, and deriving the specific electrode positions of the multi-point probe on the surface of the test sample by using the distance and performing a data fit by minimizing an error function constituting the sum of the set of differences.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.