Patent · US Active

Device for suppressing stray radiation

US11136237B2 · kind B2 · utility

1Cited by

0References

22Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Werner Simbuerger · Haar, DE
Eduardo Schittler Neves · Olching, DE
Andreas Wiesbauer · Powirtschach, AT

Key dates

Filing date	Sep 25, 2019
Grant date	Oct 5, 2021
Priority date	—
Expiry date	Jan 30, 2040

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2207/11
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A device for suppressing stray radiation includes a Micro-ElectroMechanical System (MEMS) sensor module and a conductive cage structure. The conductive cage structure may enclose the MEMS sensor module in order to suppress penetration of stray electromagnetic radiation with a stray wavelength λo into the conductive cage structure, and the conductive cage structure may be arranged to be thermally insulated from the MEMS sensor module. The device may also include a connecting line. The connecting line may be connected to the MEMS sensor module and fed through the conductive cage structure by a capacitive element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.