Patent · US Active

Photoacoustic gas sensor and method for operating a photoacoustic gas sensor

US11137376B2 · kind B2 · utility

2Cited by

1References

20Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Matthias Eberl · Schweinhub, DE
Thomas Albrecht · Beilngries, DE

Key dates

Filing date	May 10, 2019
Grant date	Oct 5, 2021
Priority date	—
Expiry date	Feb 27, 2040

Classification

Technology area (CPC G)Physics
CPC primaryG01N2291/021
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A photoacoustic gas sensor includes a hermetically sealed housing filled with a reference gas. The photoacoustic gas sensor furthermore includes a microphone arranged in the housing and configured to generate a microphone signal as a function of a sound wave based on light incident in the housing. Furthermore, the photoacoustic gas sensor includes a controllable heat source arranged in the housing and configured to selectively thermoacoustically excite the reference gas in order to generate a thermoacoustic sound wave phase-shifted with respect to the sound wave.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.