Radiation heater arrangement
US11143416B2 · kind B2 · utility
0Cited by
4References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 29, 2014 |
| Grant date | Oct 12, 2021 |
| Priority date | — |
| Expiry date | Aug 31, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67115
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
An electrical radiation heater arrangement for a vacuum enclosure includes at least two sets of linear heating sources, arranged in a corresponding number of concentric heating zones. The heating sources are arranged directly on the vacuum side of the vacuum enclosure and electrically connected to current rails arranged on the vacuum side with each of the current rails being connected to one electrical feedthrough from vacuum to ambient. Preferably, the heating sources are arranged in a polygon approaching a circle, essentially radially or a combination of both.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.