Electronic device and method of manufacturing the same
US11145731B2 · kind B2 · utility
4Cited by
2References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 8, 2020 |
| Grant date | Oct 12, 2021 |
| Priority date | — |
| Expiry date | Jul 8, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D1/684
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Provided are an electronic device including a dielectric layer having an adjusted crystal orientation and a method of manufacturing the electronic device. The electronic device includes a seed layer provided on a substrate and a dielectric layer provided on the seed layer. The seed layer includes crystal grains having aligned crystal orientations. The dielectric layer includes crystal grains having crystal orientations aligned in the same direction as the crystal orientations of the seed layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.