Miniature RF and microwave components and methods for fabricating such components

US11145947B2 · kind B2 · utility

Assignee

• Microfabrica Inc. · US

Inventors

• Elliott R. Brown · Beavercreek, US
• John D. Evans · Springfield, US
• Christopher A. Bang · San Diego, US
• Adam L. Cohen · San Fernando, US
• Michael S. Lockard · Boulder Creek, US
• Dennis R. Smalley · Santa Clarita, US
• Morton Grosser · Menlo Park, US

Key dates

• Filing date: Dec 11, 2019
• Grant date: Oct 12, 2021
• Expiry date: Dec 11, 2039

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C25D5/10
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

RF and microwave radiation directing or controlling components are provided that may be monolithic, that may be formed from a plurality of electrodeposition operations and/or from a plurality of deposited layers of material, that may include switches, inductors, antennae, transmission lines, filters, hybrid couplers, antenna arrays and/or other active or passive components. Components may include non-radiation-entry and non-radiation-exit channels that are useful in separating sacrificial materials from structural materials. Preferred formation processes use electrochemical fabrication techniques (e.g. including selective depositions, bulk depositions, etching operations and planarization operations) and post-deposition processes (e.g. selective etching operations and/or back filling operations).