Patent · US Active

Detection and compensation of MEMS oscillating structure asymmetries and periodic jitters

US11150331B2 · kind B2 · utility

4Cited by

0References

21Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Norbert Druml · Graz, AT
Philipp Greiner · Graz, AT
Ievgeniia MAKSYMOVA · Graz, AT

Key dates

Filing date	Jul 19, 2018
Grant date	Oct 19, 2021
Priority date	—
Expiry date	Mar 31, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH03B17/00
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Systems and methods are provided for compensating errors. A system includes a microelectromechanical systems (MEMS) oscillating structure configured to oscillate about a rotation axis; a phase error detector configured to generate a phase error signal based on measured event times and expected event times of the MEMS oscillating structure oscillating about the rotation axis; and a compensation circuit configured to receive the phase error signal, remove periodic jitter components in the phase error signal to generate a compensated phase error signal, and output the compensated phase error signal.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.