Micromechanical sensor with optical transduction
US11156634B2 · kind B2 · utility
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Key dates
| Filing date | Aug 1, 2017 |
| Grant date | Oct 26, 2021 |
| Priority date | — |
| Expiry date | Aug 1, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q70/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micromechanical sensor includes a movable micromechanical element and an optical resonator of disk or ring type, wherein the optical resonator has at least one interruption; and in that the movable micromechanical element is mechanically coupled to the optical resonator in such a way that a movement of the movable micromechanical element induces a modification of the width of the interruption of the optical resonator by moving at least one edge of the interruption in a direction substantially parallel to a direction of propagation of the light in the resonator at the interruption.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.