Vacuum actuator containment for molecular contaminant and particle mitigation
US11156926B2 · kind B2 · utility
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2References
20Claims
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Key dates
| Filing date | Aug 6, 2020 |
| Grant date | Oct 26, 2021 |
| Priority date | — |
| Expiry date | Aug 6, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An actuator for an optic mount in a vacuum environment includes a bellows around an actuator compartment. The bellows provides a seal around the actuator. A filter assembly is positioned between the actuator compartment and an interior of a vacuum chamber. The filter assembly includes a first particle filter, a second particle filter, and a purifier medium between the first particle filter and the second particle filter. Vacuum conditions in the actuator compartment can be achieved with a pump for the vacuum chamber, but particles and contaminants from the actuator or actuator compartment are captured by the filter assembly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.