Patent · US Active

Multi-beam particle microscope

US11158482B2 · kind B2 · utility

2Cited by

90References

22Claims

0Family size

Assignee

Carl Zeiss MultiSEM GmbH · DE

Inventors

Dirk Zeidler · Oberkochen, DE
Stefan Schubert · Oberkochen, DE

Key dates

Filing date	Aug 14, 2020
Grant date	Oct 26, 2021
Priority date	—
Expiry date	Aug 14, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2482
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A multi-beam particle microscope includes a multi-beam particle source, an objective lens, a detector arrangement, and a multi-aperture plate with a multiplicity of openings. The multi-aperture plate is between the objective lens and the object plane. The multi-aperture plate includes a multiplicity of converters which convert backscattered electrons which are generated by primary particle beams at an object into electrons with a lower energy, which provide electrons that form electron beams detected by the detector arrangement.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.