Inventor · Oberkochen, DE

Stefan Schubert

30Patents
9h-index
41Co-inventors
71Inventor score

Filing activity: Feb 17, 2012 → Jul 19, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US9263233B2 Charged particle multi-beam inspection system and method of operating the same Electricity 28 Active
US10535494B2 Particle beam system and method for the particle-optical examination of an object Electricity 26 Active
US10811215B2 Charged particle beam system Electricity 23 Active
US10541112B2 Charged particle beam system and method of operating the same Electricity 22 Active
US10622184B2 Objective lens arrangement usable in particle-optical systems Electricity 22 Active
US10354831B2 Charged particle inspection method and charged particle system Electricity 22 Active
US9530613B2 Focusing a charged particle system Electricity 22 Active
US9099282B2 Focusing a charged particle imaging system Electricity 18 Active
US10163603B2 Particle beam system and method for the particle-optical examination of an object Electricity 9 Active
US9324537B2 Charged particle inspection method and charged particle system Electricity 7 Active
US11049686B2 Particle beam system and method for the particle-optical examination of an object Electricity 7 Active
US10147002B2 Method and apparatus for determining a road condition Electricity 5 Active
US10121635B2 Charged particle beam system and method of operating the same Electricity 2 Active
US11158482B2 Multi-beam particle microscope Electricity 2 Active
US11164715B2 Charged particle beam system Electricity 2 Active
US10569755B2 Detection of movement of a parked vehicle Performing Operations; Transporting 1 Active
US11562881B2 Charged particle beam system Electricity 1 Active
US9653255B2 Scanning particle microscope having an energy selective detector system Electricity 1 Active
US11657999B2 Particle beam system and method for the particle-optical examination of an object Electricity 1 Active
US12340973B2 Particle beam system including a multi-beam deflection device and a beam stop, method for operating the particle beam system and associated computer program product Electricity 0 Active
US12254122B2 System and method for password-less authentication through digital driving license Electricity 0 Active
US11645740B2 Method for detector equalization during the imaging of objects with a multi-beam particle microscope Electricity 0 Active
US12255040B2 Multi-beam particle beam system and method for operating same Electricity 0 Active
US10926832B2 Gearbox Mechanical Engineering; Lighting; Heating 0 Active
US12119204B2 Particle beam system and the use thereof for flexibly setting the current intensity of individual particle beams Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.