Patent · US Active

Measuring device for examining a specimen and method for determining a topographic map of a specimen

US11168976B2 · kind B2 · utility

2Cited by

0References

20Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Manuel Amthor · Jena, DE
Daniel Haase · Zöllnitz, DE
Dominik Stehr · Jena, DE

Key dates

Filing date	Nov 18, 2020
Grant date	Nov 9, 2021
Priority date	—
Expiry date	Nov 18, 2040

Classification

Technology area (CPC G)Physics
CPC primaryG06T2207/30141
WIPO fieldComputer technology
WIPO sectorElectrical engineering

Abstract

A method for determining a height map of a sample includes the following steps: receiving height measurement data of the sample; receiving an overview image of the sample; identifying certain image regions in the overview image; deriving context information in relation to identified image regions; and supplementing or altering the height measurement data with the aid of the context information. Moreover, a measuring apparatus configured to carry out the method is described.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.