Patent · US Active

Pressure sensor device and method of sensing pressure

US11169039B2 · kind B2 · utility

0Cited by

3References

17Claims

0Family size

Assignee

MELEXIS TECHNOLOGIES NV · BE

Inventors

Laurent Otte · Brussels, BE
Appolonius Jacobus Van Der Wiel · Tessenderlo, BE
Jian Chen · Baoshan, TW

Key dates

Filing date	Aug 30, 2019
Grant date	Nov 9, 2021
Priority date	—
Expiry date	Dec 31, 2039

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02A50/20
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A pressure sensor device comprises a device package (110) arranged to define a cavity (116) having an opening for fluid communication with an internal volume thereof. The cavity (116) comprises a side wall (114, 115). An elongate pressure sensor element (100) is provided and has a proximal end (120) and a distal end (122). The side wall (114, 115) is arranged to hold fixedly the proximal end (120) of the pressure sensor element (100) therein so that the pressure sensor element (100) is cantilever-suspended from the side wall (114, 115) within the cavity (116).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.