Patent · US Active

Methods and devices for examining an electrically charged specimen surface

US11170970B2 · kind B2 · utility

0Cited by

8References

19Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Michael Budach · Hanau, DE
Michael Schnell · Ingolstadt, DE
Bernd Schindler · Werl, DE
Markus Boese · Aalen, DE

Key dates

Filing date	Aug 21, 2018
Grant date	Nov 9, 2021
Priority date	—
Expiry date	Jan 2, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/3174
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A method for examining a specimen surface with a probe of a scanning probe microscope, the specimen surface having an electrical potential distribution. The method includes (a) determining the electrical potential distribution of at least one first partial region of the specimen surface; and (b) modifying the electrical potential distribution in the at least one first partial region of the specimen surface and/or modifying an electrical potential of the probe of the scanning probe microscope before scanning at least one second partial region of the specimen surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.