Indexable side storage pod apparatus, heated side storage pod apparatus, systems, and methods
US11171028B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 25, 2018 |
| Grant date | Nov 9, 2021 |
| Priority date | — |
| Expiry date | Jan 1, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68707
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In some embodiments, a side storage pod of an equipment front end module is provided that includes (1) an outer enclosure having a sealing surface configured to couple to the equipment front end module; (2) a side storage pod chamber having a body with a plurality of vertically-spaced storage members each configured to support a substrate; and (3) an indexer operable to vertically move the side storage pod chamber so that different subgroups of storage members are accessible by a load-unload robot in the equipment front end module. In other embodiments, a heated side storage pod is provided enabling degassing of substrates stored therein. Methods for processing substrates are described, as are numerous other aspects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.