Control method of surface characteristic measuring apparatus
US11175123B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 12, 2019 |
| Grant date | Nov 16, 2021 |
| Priority date | — |
| Expiry date | Jan 28, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B3/008
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A control method of surface characteristic measuring apparatus relatively displaces by a relative displacement mechanism, detects when the distal end of the stylus contacting the measurable surface, calculates an amount of relative displacement in the Z-axis direction between the measuring device and the measured object required for a measuring arm to be leveled after the distal end of the stylus contacts the measurable surface, calculates a displacement amount generated in the distal end of the stylus in an X-axis direction when the measuring device and the measured object are relatively displaced only by in the Z-axis direction; and levels the measuring arm by relatively displacing only by the measuring device and the measured object in the Z-axis direction by the relative displacement mechanism, and relatively displaces only by the measuring device and the measured object in the X-axis direction by the relative displacement mechanism at the same time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.