Patent · US Active

Semi-automatic prober

US11175309B2 · kind B2 · utility

1Cited by

5References

15Claims

0Family size

Assignee

QualiTau, Inc. · US

Inventors

Edward McCloud · Castro Valley, US
Jacob Herschmann · Palo Alto, US

Key dates

Filing date	Dec 21, 2015
Grant date	Nov 16, 2021
Priority date	—
Expiry date	Feb 3, 2036

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/2886
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A wafer probe station system for reliability testing of a semiconductor wafer. The wafer probe station is capable of interfacing with interchangeable modules for testing of semiconductor wafers. The wafer probe station can be used with different interchangeable modules for wafer testing. Modules, such as probe card positioners and air-cooled rail systems, for example, can be mounted or docked to the probe station. The wafer probe station is also provided with a front loading mechanism having a rotatable arm that rotates at least partially out of the probe station chamber for wafer loading.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.