Atomic layer deposition coatings for high temperature ceramic components
US11180847B2 · kind B2 · utility
2Cited by
37References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 6, 2018 |
| Grant date | Nov 23, 2021 |
| Priority date | — |
| Expiry date | May 4, 2039 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C28/42
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Certain embodiments of the present disclosure relate to coated articles and methods of coating articles. In one embodiment, a coated article comprises an article adapted for use in a processing chamber, and a coating formed on exterior and interior surfaces of the article. In one embodiment, the coating comprises a rare earth metal-containing ceramic, and the coating is substantially uniform, conformal, and porosity-free.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.