Rotary reactor for uniform particle coating with thin films

US11180851B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Colin C. Neikirk · Mountain View, US
• Pravin K. Narwankar · Sunnyvale, US
• Kaushal Gangakhedkar · San Jose, US
• Visweswaren Sivaramakrishnan · Cupertino, US
• Jonathan Frankel · Los Gatos, US
• David Masayuki Ishikawa · Mountain View, US
• Quoc Truong · San Ramon, US
• Joseph Yudovsky · Campbell, US

Key dates

• Filing date: Jun 11, 2019
• Grant date: Nov 23, 2021
• Expiry date: Jul 17, 2039

Classification

• Technology area (CPC A): Human Necessities
• CPC primary: A61K9/5089
• WIPO field: Pharmaceuticals
• WIPO sector: Chemistry

Abstract

A reactor for coating particles includes one or more motors, a rotary vacuum chamber configured to hold particles to be coated and coupled to the motors, a controller configured to cause the motors to rotate the chamber in a first direction about an axial axis at a rotation speed sufficient to force the particles to be centrifuged against an inner diameter of the chamber, a vacuum port to exhaust gas from the rotary vacuum chamber, a paddle assembly including a rotatable drive shaft extending through the chamber and coupled to the motors and at least one paddle extending radially from the drive shaft, such that rotation of the drive shaft by the motors orbits the paddle about the drive shaft in a second direction, and a chemical delivery system including a gas outlet on the paddle configured inject process gas into the particles.