Methods and systems for compressing shape data for electronic designs
US11182929B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 18, 2020 |
| Grant date | Nov 23, 2021 |
| Priority date | — |
| Expiry date | Feb 18, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T9/20
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Methods for compressing shape data for a set of electronic designs include inputting a set of shape data, where the shape data represents a set of shapes for a device fabrication process. A convolutional autoencoder is used on the set of shape data, the convolutional autoencoder having a pre-determined set of convolution layers including a kernel size and filter size for each convolution layer. The set of shape data is encoded to compress the set of shape data, using the pre-determined set of convolution layers of the convolutional autoencoder, to create a set of encoded shape data. The set of shape data comprises an SEM image, and the encoded set of shape data identifies a mask defect.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.