Apparatus and method for calibrating a pressure sensing device
US11187607B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 5, 2019 |
| Grant date | Nov 30, 2021 |
| Priority date | — |
| Expiry date | Dec 11, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/125
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for calibrating a pressure sensing device having a pressure sensor and a temperature compensation device includes: a chamber for applying a variable temperature and a variable pressure to the pressure sensing device; a temperature regulation device for regulating the temperature in the chamber designed such that the temperature in the chamber respectively increases in a strictly monotonous manner or falls in a strictly monotonous manner during one or more time intervals; a pressure regulation device for regulating the pressure in the chamber designed such that the pressure in the chamber respectively monotonously increases or respectively monotonously falls in at least one of the time intervals during a plurality of sub-intervals of the one-time interval; a reference pressure sensor for sensing the pressure in the chamber during the time interval(s); and a data record generation device for generating corresponding data records.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.