Device and method for determining the concentration of a vapor
US11187676B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 22, 2018 |
| Grant date | Nov 30, 2021 |
| Priority date | — |
| Expiry date | Jul 12, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/02845
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device for determining the partial pressure or concentration of a vapor in a volume includes a sensor element that can be caused to oscillate and temperature-controlled to a temperature below the condensation temperature of the vapor. The sensor element has an oscillation frequency that is influenced by a mass accumulation formed by condensed vapor on the sensor surface thereof. The rear side of the sensor element pointing away from the sensor surface contacts a thermal transfer surface of a thermal transfer element. The thermal transfer element is formed from an electrically heatable heating element that is connected to a cooling element in a thermally conductive manner by a thermal dissipation surface, which is different from the thermal transfer surface. The thermal transfer surface extends substantially parallel to the thermal dissipation surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.