Time dependent dielectric breakdown test structure and test method thereof
US11187740B2 · kind B2 · utility
2Cited by
4References
7Claims
0Family size
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Key dates
| Filing date | Dec 2, 2018 |
| Grant date | Nov 30, 2021 |
| Priority date | — |
| Expiry date | May 22, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/34
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A time dependent dielectric breakdown test structure includes a plurality of test units connected in parallel between a constant voltage and a ground. Each of the plurality of test units includes a dielectric test sample connected to the constant voltage; and a current restraint unit connected between the dielectric test sample and the ground, for restraining a breakdown current from flowing on the dielectric test sample after the constant voltage has broken the dielectric test sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.