Method of building a 3D functional optical material layer stacking structure

US11187836B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Michael Y. Young · Cupertino, US
• Ludovic Godet · Sunnyvale, US
• Robert Jan Visser · Menlo Park, US
• Naamah ARGAMAN · San Jose, US
• Christopher Dennis Bencher · San Jose, US
• Wayne MCMILLAN · San Jose, US

Key dates

• Filing date: Mar 5, 2019
• Grant date: Nov 30, 2021
• Expiry date: May 31, 2039

Classification

• Technology area (CPC G): Physics
• CPC primary: G03H2260/63
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

Embodiments herein describe a sub-micron 3D diffractive optics element and a method for forming the sub-micron 3D diffractive optics element. In a first embodiment, a method is provided for forming a sub-micron 3D diffractive optics element on a substrate without planarization. The method includes depositing a material stack to be patterned on a substrate, depositing and patterning a thick mask material on a portion of the material stack, etching the material stack down one level, trimming a side portion of the thick mask material, etching the material stack down one more level, repeating trim and etch steps above ‘n’ times, and stripping the thick mask material from the material stack.