Plasma generating arrangement
US11189463B2 · kind B2 · utility
1Cited by
4References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 25, 2019 |
| Grant date | Nov 30, 2021 |
| Priority date | — |
| Expiry date | Feb 25, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/327
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A plasma generating arrangement includes a plurality of plasma sources, each plasma source including a respective antenna coil assembly electrically coupled to a common electrical terminal via a respective transmission line. Each transmission line is configured to communicate a radio frequency electrical power signal from the common electrical terminal to the respective antenna coil assembly, and has a length which is an odd multiple of ¼ of the wavelength of the radio frequency electrical power signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.