High frequency generator having dual outputs and its driving method
US11189471B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 30, 2020 |
| Grant date | Nov 30, 2021 |
| Priority date | — |
| Expiry date | Aug 1, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03F2200/451
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A high frequency generator having dual outputs comprises: a high frequency amplifying unit configured to amplify a DC voltage of a predetermined level, and output a first and a second high frequency amplification signal; a combiner configured to combine the first high frequency amplification signal and the second high frequency amplification signal, and output a high frequency power signal; a high frequency sensor disposed on output side of the combiner, configured to detect an electrical signal flowing the output side of the combiner, and output an electrical detection signal; a controller configured to output multiple control signals by using an externally applied control signal and the electrical detection signal; and a switching unit disposed between the combiner and the plasma chamber, and controlled by a switching control signal outputted from the controller to output the high frequency power signal to a first high frequency power output signal through a first output terminal and to output the high frequency power signal to a second high frequency power signal through a second output terminal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.