Photocurrent scanning system
US11190132B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jan 16, 2019 |
| Grant date | Nov 30, 2021 |
| Priority date | — |
| Expiry date | Jan 16, 2039 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/50
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A photocurrent scanning system comprises a laser generating device, a focusing device, a displacement adjustment device, a bias supply device, and a measuring device. The laser generating device is used to emit a laser. The focusing device is used to focus the laser to a surface of a sample. The displacement adjustment device is used to place the sample and adjust a position of the sample, to make the laser focused onto different parts of the surface of the sample. The bias supply device is used to supply a voltage to the sample. The measuring device is used to measure a photocurrent signal flowing through the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.