Patent · US Active

Photocurrent scanning system

US11190132B2 · kind B2 · utility

0Cited by
3References
20Claims
0Family size

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Key dates

Filing dateJan 16, 2019
Grant dateNov 30, 2021
Priority date
Expiry dateJan 16, 2039

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY02E10/50
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A photocurrent scanning system comprises a laser generating device, a focusing device, a displacement adjustment device, a bias supply device, and a measuring device. The laser generating device is used to emit a laser. The focusing device is used to focus the laser to a surface of a sample. The displacement adjustment device is used to place the sample and adjust a position of the sample, to make the laser focused onto different parts of the surface of the sample. The bias supply device is used to supply a voltage to the sample. The measuring device is used to measure a photocurrent signal flowing through the sample.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.