Equipment module with enhanced protection from airborne contaminants, and method of operation
US11194259B2 · kind B2 · utility
1Cited by
35References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 21, 2019 |
| Grant date | Dec 7, 2021 |
| Priority date | — |
| Expiry date | Aug 21, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67772
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An Equipment Front End Module (EFEM) having a Front Opening Unified Pod (FOUP) dock and a tool access port, includes a robotic wafer handling system configured to transfer silicon wafers between a FOUP coupled to the FOUP dock and a process tool positioned for access via the tool access port. An air curtain system inside the EFEM is positioned to produce an air curtain across the tool access port while the port is open, acting to isolate the interior of the EFEM from the tool environment, and prevent passage of airborne contaminants into the EFEM via the access port.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.