Symmetric flow valve for higher flow conductance

US11199267B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Andrew Nguyen · San Jose, US
• Yogananda Sarode Vishwanath · Kanchinakote, IN
• Xue Yang Chang · San Jose, US
• Anilkumar Rayaroth · San Jose, US
• Chetan Naik · Kanchinakote, IN
• Balachandra Jatak Narayan · Kanchinakote, IN

Key dates

• Filing date: Aug 16, 2019
• Grant date: Dec 14, 2021
• Expiry date: Dec 10, 2039

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T137/87877
• WIPO field: Mechanical elements
• WIPO sector: Mechanical engineering

Abstract

Embodiments of symmetric flow valves for use in a substrate processing chamber are provided herein. In some embodiments, a symmetric flow valve includes a valve body having sidewalls, a bottom plate, and a top plate that together define an interior volume, wherein the top plate includes one or more axisymmetrically disposed openings; a poppet disposed in the interior volume, wherein the poppet includes a central opening and a plurality of portions configured to selectively seal the one or more axisymmetrically disposed openings of the top plate when the symmetric flow valve is in a closed position; and a first actuator coupled to the poppet to position the poppet within the interior volume in at least an open position, where the poppet is spaced apart from the top plate to allow flow through the one or more axisymmetrically disposed openings of the top plate, and the closed position.