Repeater defect detection
US11204332B2 · kind B2 · utility
0Cited by
8References
19Claims
0Family size
Assignee
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Key dates
| Filing date | Apr 10, 2020 |
| Grant date | Dec 21, 2021 |
| Priority date | — |
| Expiry date | Jun 18, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Defects from a hot scan can be saved, such as on persistent storage, random access memory, or a split database. The persistent storage can be patch-based virtual inspector virtual analyzer (VIVA) or local storage. Repeater defect detection jobs can determined and the wafer can be inspected based on the repeater defect detection jobs. Repeater defects can be analyzed and corresponding defect records to the repeater defects can be read from the persistent storage. These results may be returned to the high level defect detection controller.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.