Patent · US Active

Probe for testing an electrical property of a test sample

US11215638B2 · kind B2 · utility

0Cited by

3References

14Claims

0Family size

Assignee

CAPRES A/S · DK

Inventor

Lior Shiv · Yoqneam Illit, IL

Key dates

Filing date	Mar 2, 2018
Grant date	Jan 4, 2022
Priority date	—
Expiry date	Apr 19, 2038

Classification

Technology area (CPC H)Electricity
CPC primaryH01L22/14
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A probe for direct nano- and micro-scale electrical characterization of materials and semi conductor wafers. The probe (10) comprises a probe body (12), a first cantilever (20a) extending from the probe body. The first cantilever defining a first loop with respect to said probe body. The probe further comprises a first contact probe being supported by said first cantilever, and a second contact probe being electrically insulated from the first contact probe. The second contact probe being supported by the first cantilever or by a second cantilever (20b) extending from the probe body.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.