Testing device

US11226364B2 · kind B2 · utility

Assignees

• Afore Oy · FI
• Bluefors Cryogenics Oy · FI

Inventors

• Aki Junes · Turku, FI
• Ari Kuukkala · Turku, FI
• Timo Salminen · Turku, FI
• Vesa Henttonen · Turku, FI
• Matti Manninen · Kotka, FI
• David GUNNARSSON · Helsinki, FI
• Leif Roschier · Vantaa, FI

Key dates

• Filing date: Apr 29, 2020
• Grant date: Jan 18, 2022
• Expiry date: May 28, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/2887
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A testing device (100) is for electrically testing integrated circuits on a wafer (102). The testing device (100) includes a vacuum chamber (109), a chuck (101) for holding the wafer (102), a probe card (103) for electrically contacting the integrated circuits, and a radiation shield (107) arranged inside the vacuum chamber (109) and enclosing the chuck (101) and the probe card (103). In the testing device (100), the vacuum chamber (109) is provided with a gate valve (123), the radiation shield (107) is provided with a hatch (122), and the testing device (100) includes a wafer loading assembly (125) for loading the wafer (102) onto the chuck (101) through the gate valve (123) and the hatch (122).