Patent · US Active

Automated image measurement for process development and optimization

US11227193B2 · kind B2 · utility

1Cited by

0References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Abhinav Kumar · San Jose, US
Benjamin Schwarz · Strohberg, DE
Charles Hardy · San Marcos, US

Key dates

Filing date	Mar 29, 2021
Grant date	Jan 18, 2022
Priority date	—
Expiry date	Mar 29, 2041

Classification

Technology area (CPC G)Physics
CPC primaryG06V2201/06
WIPO fieldComputer technology
WIPO sectorElectrical engineering

Abstract

A method includes providing attributes of a manufacturing process and an image of a product associated with the manufacturing process to a trained machine learning model. The method further includes obtaining, from the trained machine learning model, predictive data. The method further includes determining, based on the predictive data, image measurements of the image of the product associated with the manufacturing process. Manufacturing parameters of the manufacturing process are to be updated based on the image measurements.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.