Device that holds substrate in substrate holder and/or releases holding of substrate using substrate holder, and plating apparatus including the same
US11236434B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 4, 2019 |
| Grant date | Feb 1, 2022 |
| Priority date | — |
| Expiry date | Mar 10, 2040 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC25D17/001
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A substrate attachment and detachment device appropriate for a double-sided holder is provided. The substrate attachment and detachment device is a device that holds a substrate in a substrate holder and/or releases the holding of the substrate using the substrate holder. The substrate holder includes a first frame and a second frame. The first frame and the second frame have openings, respectively. The device includes a substrate supporting unit that sandwiches the substrate between the first frame and the second frame. The substrate supporting unit includes a lower substrate supporter, and an upper substrate supporter. The lower substrate supporter is configured to come into contact with the substrate through the opening of the frame positioned on a lower side. The upper substrate supporter is configured to come into contact with the substrate through the opening of the frame positioned on an upper side.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.