Patent · US Active

Thermal pattern sensor with pyroelectric capacitance

US11237058B2 · kind B2 · utility

0Cited by

6References

15Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Mohammed Benwadih · Champigny-sur-Marne, FR
Amelie Revaux · Voiron, FR

Key dates

Filing date	Dec 3, 2018
Grant date	Feb 1, 2022
Priority date	—
Expiry date	Dec 17, 2038

Classification

Technology area (CPC G)Physics
CPC primaryG06V40/1329
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Thermal pattern sensor comprising several pixels arranged on a substrate, each pixel including at least one pyroelectric capacitance formed by at least one portion of pyroelectric material arranged between at least one lower electrode and at least one upper electrode, with the lower electrode arranged between the substrate and the portion of pyroelectric material, and in which at least one protective dielectric layer is arranged between the portion of pyroelectric material and the upper electrode and comprises at least one of the following materials: fluoropolymer, self-assembled molecular monolayer, dielectric material soluble in a solvent orthogonal to the pyroelectric material.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.