Sensor element, particle sensor device and method for detecting a particulate matter density

US11237090B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Michael Schneider · Wien, AT
• Alfons Dehe · Reutlingen, DE
• Manuel Dorfmeister · Wien, AT
• Christoph Glacer · Munich, DE
• Ulrich Krumbein · Rosenheim, DE
• Ulrich Schmid · Wien, AT
• David Tumpold · Tauberbischofsheim, DE

Key dates

• Filing date: Mar 3, 2020
• Grant date: Feb 1, 2022
• Expiry date: Mar 26, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2291/042
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A sensor element includes a membrane structure suspended on a frame structure, wherein the membrane structure includes a membrane element and an actuator. The membrane structure is deflectable in a first stable deflection state and in a second stable deflection state and is operable in a resonance mode in at least one of the first and the second stable deflection states. The actuator is configured to deflect the membrane structure in a first actuation state into one of the first and the second stable deflection states, and to operate the membrane structure in a second actuation state in a resonance mode having an associated resonance frequency.