MEMS gas sensor
US11237098B2 · kind B2 · utility
1Cited by
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27Claims
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Assignee
Inventor
Key dates
| Filing date | Jan 28, 2020 |
| Grant date | Feb 1, 2022 |
| Priority date | — |
| Expiry date | Jun 5, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/508
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS gas sensor includes a photoacoustic sensor including a thermal emitter and an acoustic transducer, the thermal emitter and the acoustic transducer being inside a mutual measurement cavity. The thermal emitter includes a semiconductor substrate and a heating structure supported by the semiconductor substrate. The heating structure includes a heating element. The MEMS gas sensor further includes a chemical sensor thermally coupled to the heating element, and the chemical sensor including a gas adsorbing layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.