Detection device and manufacturing method thereof
US11237189B2 · kind B2 · utility
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16Claims
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Key dates
| Filing date | Aug 7, 2019 |
| Grant date | Feb 1, 2022 |
| Priority date | — |
| Expiry date | Sep 12, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/06744
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A detection device includes: a metal body having a plurality of main vias, a plurality of main through holes with insulators formed on the hole walls of the main vias, and a plurality of connecting elements disposed in the main through holes. Therefore, when testing a chip with I/O pins of high density with the detection device, the connecting elements contact the insulator only, without contacting the hole walls of the main vias, and the problem of short circuits can be avoided. A method of forming a detection device is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.