Capacitive pressure sensors and other devices having a suspended membrane and having rounded corners at an anchor edge
US11248976B2 · kind B2 · utility
0Cited by
11References
24Claims
0Family size
Assignee
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Key dates
| Filing date | Nov 16, 2018 |
| Grant date | Feb 15, 2022 |
| Priority date | — |
| Expiry date | Nov 16, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0061
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Capacitive pressure sensors and other devices are disclosed. In an embodiment a semiconductor device includes a first electrode, a cavity over the first electrode and a second electrode including a suspended membrane over the cavity and electrically conductive anchor trenches laterally surrounding the cavity, wherein the anchor trenches include an inner anchor trench and an outer anchor trench, the outer anchor trench having rounded corners.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.