Nanopore flow cells and methods of fabrication
US11249067B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 17, 2019 |
| Grant date | Feb 15, 2022 |
| Priority date | — |
| Expiry date | Apr 5, 2040 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/019
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Nanopore flow cells and methods of manufacturing thereof are provided herein. In one embodiment a method of forming a flow cell includes forming a multi-layer stack on a first substrate, e.g., a monocrystalline silicon substrate, before transferring the multi-layer stack to a second substrate, e.g., a glass substrate. Here, the multi-layer stack features a membrane layer, having a first opening formed therethrough, where the membrane layer is disposed on the first substrate, and a material layer is disposed on the membrane layer. The method further includes patterning the second substrate to form a second opening therein and bonding the patterned surface of the second substrate to a surface of the multi-layer stack. The method further includes thinning the first substrate and thinning the second substrate. Here, the second substrate is thinned to where the second opening is disposed therethrough. The method further includes removing the thinned first substrate and at least portions of the material layer to expose opposite surfaces of the membrane layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.