Resistivity probes with curved portions

US11249110B2 · kind B2 · utility

Assignee

• KLA-TENCOR CORPORATION · US

Inventors

• Walter H. Johnson · Salem, US
• Nanchang Zhu · Shanghai, CN
• Xianghua Liu · Zhejiang, CN
• Jianli Cui · Shanghai, CN
• Zhu Shi · Shanghai, CN
• Zhuoxian Zhang · Shanghai, CN
• Haiyang You · Shanghai, CN
• Lu Yu · Hefei, CN
• Jianou Shi · State College, US
• Fan Zhang · Lake Barrington, US

Key dates

• Filing date: Nov 10, 2019
• Grant date: Feb 15, 2022
• Expiry date: Nov 10, 2039

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/2886
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Resistivity probes can be used to test integrated circuits. In one example, a resistivity probe has a substrate with multiple vias and multiple metal pins. Each of the metal pins is disposed in one of the vias. The metal pins extend out of the substrate. Interconnects provide an electrical connection to the metal pins. In another example, a resistivity probe has a substrate with a top surface and multiple elements extending from the substrate. Each of the elements curves from the substrate to a tip of the element such that each of the elements is non-parallel to the top surface of the substrate.