Workpiece-separating device and workpiece-separating method
US11251058B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 23, 2021 |
| Grant date | Feb 15, 2022 |
| Priority date | — |
| Expiry date | Aug 23, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/98
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A workpiece-separating device includes a holding member configured to detachably hold one of a workpiece or a supporting body of a laminated body and a light irradiation part configured to perform light irradiation on a separating layer, the holding member including: a stage facing one of the workpiece or the supporting body, a fixed supporting part projecting from the stage toward the laminated body and including a still suction pad immovable in a projection direction, and a movable supporting part projecting from the stage toward the laminated body and including a response suction pad that is movable in a projection direction and elastically deformable, a plurality of the fixed supporting parts and a plurality of the movable supporting parts disposed in a dispersed manner, and the plurality of response suction pads project toward the laminated body further than the plurality of still suction pads.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.