Patent assignee · JP · COMPANY

Shin-Etsu Engineering Co., Ltd.

9Patents
6Active
9Granted
40Portfolio score

Filing activity: Apr 2, 1982 → Aug 23, 2021

Most-cited patents

PatentTitleAreaCited byStatus
US4433510A Method for controlling thickness of wafer-like work pieces under lapping and a lapping machine therefor Physics 29 Expired
US4731745A Automatic dimension analyzer Physics 14 Expired
US6437304B1 Steam generator Mechanical Engineering; Lighting; Heating 4 Expired
US10840141B2 Workpiece-separating device and workpiece-separating method Performing Operations; Transporting 1 Active
US11633810B2 Workpiece-separating device and workpiece-separating method Performing Operations; Transporting 0 Active
US10293460B2 Method of producing polishing head and polishing apparatus Performing Operations; Transporting 0 Active
US11322384B2 Substrate processing apparatus and substrate processing method Electricity 0 Active
US11251058B1 Workpiece-separating device and workpiece-separating method Electricity 0 Active
US11654513B2 Workpiece-separating device and workpiece-separating method Electricity 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.