Metal complexes for depositing films and method of making and using the same
US11253846B2 · kind B2 · utility
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22Claims
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Key dates
| Filing date | Mar 13, 2020 |
| Grant date | Feb 22, 2022 |
| Priority date | — |
| Expiry date | Mar 13, 2040 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2531/828
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Provided herein are methods of catalytic hydrosilylation, including triggerable methods, using metal-ligand complexes as catalysts, characterized by formula MLxDy; wherein: M is a metal; x is equal to the oxidation state of M; each D is independently a neutral coordinating ligand; y is zero or an integer selected from the range of 1 to 4; and each L is independently a mono-anionic ligand. L may be a η1,η2-β,β-disubstituted-ω-alkenyl ligand.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.