Patent · US Active

Determining width and height of electron spot

US11257651B2 · kind B2 · utility

0Cited by

1References

11Claims

0Family size

Assignee

Excillum AB · SE

Inventors

Per Takman · Sollentuna, SE
Ulf Lundström · Sollentuna, SE
Bjorn Hansson · Bromma, SE

Key dates

Filing date	Jun 24, 2019
Grant date	Feb 22, 2022
Priority date	—
Expiry date	Jun 24, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH05G1/52
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A method in an X-ray source configured to emit, from an interaction region, X-ray radiation generated by an interaction between an electron beam and a target, the method including the steps of: providing the target; providing the electron beam; deflecting the electron beam along a first direction relative the target; detecting electrons indicative of the interaction between the electron beam and the target; determining a first extension of the electron beam on the target, along the first direction, based on the detected electrons and the deflection of the electron beam; detecting X-ray radiation generated by the interaction between the electron beam and the target; and determining a second extension of the electron beam on the target, along a second direction, based on the detected X-ray radiation.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.